High performance of thin nano-crystalline ZrN diffusion...

High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems

Mayumi B. Takeyama, Takaomi Itoi, Eiji Aoyagi, Atsushi Noya
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Volume:
190
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00916-3
File:
PDF, 191 KB
english, 2002
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