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High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
Mayumi B. Takeyama, Takaomi Itoi, Eiji Aoyagi, Atsushi NoyaVolume:
190
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00916-3
File:
PDF, 191 KB
english, 2002