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Surface study of thin film gas sensors on a Si micro-machined substrate
M.P Casaletto, S Kaciulis, G Mattogno, L Pandolfi, G Scavia, L Dori, S Nicoletti, M Severi, S ZampolliVolume:
189
Year:
2002
Language:
english
Pages:
14
DOI:
10.1016/s0169-4332(01)01034-0
File:
PDF, 789 KB
english, 2002