Synthesis of ZrO2 thin films by atomic layer deposition:...

Applied Surface Science 2002 Vol. 193; Iss. 1-4

Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

Michel Cassir, Fabrice Goubin, Cécile Bernay, Philippe Vernoux, Daniel Lincot
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Volume:
193
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0169-4332(02)00247-7
File:
PDF, 436 KB
english, 2002
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