Development of prominent PLD (Aurora method) suitable for...

Development of prominent PLD (Aurora method) suitable for high-quality and low-temperature film growth

Takeshi Kobayashi, Hideki Akiyoshi, Minoru Tachiki
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Volume:
197-198
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(02)00386-0
File:
PDF, 526 KB
english, 2002
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