Development of prominent PLD (Aurora method) suitable for high-quality and low-temperature film growth
Takeshi Kobayashi, Hideki Akiyoshi, Minoru TachikiVolume:
197-198
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(02)00386-0
File:
PDF, 526 KB
english, 2002