Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Tetsuya Makimura, Yoshiaki Yamamoto, Shinjo Mitani, Taiji Mizuta, Chang Qing Li, Daishi Takeuchi, Kouichi Murakami
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Volume:
197-198
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(02)00438-5
File:
PDF, 93 KB
english, 2002
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