Spectroscopic ellipsometry of non-absorbing films independent of film thickness
J.C Martı́nez-Antón, J.A Gómez-PedreroVolume:
193
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0169-4332(02)00494-4
File:
PDF, 203 KB
english, 2002