Application of micro-airbridge isolation in high speed HBT...

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Application of micro-airbridge isolation in high speed HBT fabrication

S. Tadayon, G. Metze, A. Cornfeld, K. Pande, H. Huang, B. Tadayon
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Year:
1993
Language:
english
DOI:
10.1049/el:19930017
File:
PDF, 369 KB
english, 1993
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