Particulates-free Ta thin films obtained by pulsed laser...

Applied Surface Science 2002 Vol. 195; Iss. 1-4

Particulates-free Ta thin films obtained by pulsed laser deposition: the role of a second laser in the laser-induced plasma heating

E György, I.N Mihailescu, M Kompitsas, A Giannoudakos
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Volume:
195
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(02)00561-5
File:
PDF, 208 KB
english, 2002
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