Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices
F. Zanderigo, D. Brazzelli, S. Rocca, A. Pregnolato, A. Grossi, G. QueiroloVolume:
203-204
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(02)00696-7
File:
PDF, 283 KB
english, 2003