TOF-SIMS depth profiling of SIMON

TOF-SIMS depth profiling of SIMON

Ge Xin, Gui Dong, Chen Xu, Cha Liangzhen, O. Brox, A. Benninghoven
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Volume:
203-204
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(02)00697-9
File:
PDF, 171 KB
english, 2003
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