A correlation of TOF-SIMS and TXRF for the analysis of...

Applied Surface Science 2003 Vol. 203-204; Iss. none

A correlation of TOF-SIMS and TXRF for the analysis of trace metal contamination on silicon and gallium arsenide

Ian Mowat, Pat Lindley, Lori McCaig
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Volume:
203-204
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(02)00764-x
File:
PDF, 236 KB
english, 2003
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