Improvement of electrical characteristics of silicon oxynitride layers by a platinum method
Toshiko Mizokuro, Masafumi Tamura, Toshiro Yuasa, Takuya Kobayashi, Osamu Maida, Masao Takakashi, Hikaru KobayashiVolume:
199
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(02)00842-5
File:
PDF, 154 KB
english, 2002