Improvement of electrical characteristics of silicon...

Improvement of electrical characteristics of silicon oxynitride layers by a platinum method

Toshiko Mizokuro, Masafumi Tamura, Toshiro Yuasa, Takuya Kobayashi, Osamu Maida, Masao Takakashi, Hikaru Kobayashi
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Volume:
199
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(02)00842-5
File:
PDF, 154 KB
english, 2002
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