Interactions of moisture and organic contaminants with SiO2...

Applied Surface Science 2003 Vol. 205; Iss. 1-4

Interactions of moisture and organic contaminants with SiO2 and ZrO2 gate dielectric films

Niraj Rana, Prashant Raghu, Eric Shero, Farhang Shadman
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Volume:
205
Year:
2003
Language:
english
Pages:
16
DOI:
10.1016/s0169-4332(02)01014-0
File:
PDF, 362 KB
english, 2003
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