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Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film
Shi-Jin Ding, David Wei Zhang, Ji-Tao Wang, Wei William LeeVolume:
206
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(02)01234-5
File:
PDF, 341 KB
english, 2003