Excimer laser microvia-technology in multichip modules

Applied Surface Science 2003 Vol. 208-209; Iss. none

Excimer laser microvia-technology in multichip modules

Boniface Manirambona, Johan De Baets, Alfons Vervaet
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Volume:
208-209
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(02)01362-4
File:
PDF, 219 KB
english, 2003
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