Excimer laser ablation lithography applied to the...

Applied Surface Science 2003 Vol. 208-209; Iss. none

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

M. Flury, A. Benatmane, P. Gérard, P.C. Montgomery, J. Fontaine, T. Engel, J.P. Schunck, E. Fogarassy
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Volume:
208-209
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(02)01391-0
File:
PDF, 186 KB
english, 2003
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