Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates
A.P. Caricato, A. Di Cristoforo, M. Fernández, G. Leggieri, A. Luches, G. Majni, M. Martino, P. MengucciVolume:
208-209
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(02)01404-6
File:
PDF, 113 KB
english, 2003