Si c(4×4) structure appeared in the initial stage of 3C-SiC...

Si c(4×4) structure appeared in the initial stage of 3C-SiC epitaxial growth on Si(0 0 1) using monomethylsilane and dimethylsilane

Yuzuru Narita, Toshikazu Inubushi, Kanji Yasui, Tadashi Akahane
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Volume:
212-213
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(03)00090-4
File:
PDF, 201 KB
english, 2003
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