Shadow Effect and Its Revisal in Grid-Enhanced Plasma...

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Shadow Effect and Its Revisal in Grid-Enhanced Plasma Source with Ion Implantation Method

Z. Gu-ling, W. Jiu-li, L. Yuan-fu, L. Xue-ming, W. Xing-fang, F. Song-hua, L. Chi-zi, Y. Si-ze
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Year:
2004
Language:
english
DOI:
10.1088/0256-307X/21/6/038
File:
PDF, 349 KB
english, 2004
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