Ion-Sputter-Induced Nanodots on Si(110): Ion Energy Dependence
L. Wei-qing, L. Li, Q. Le-jun, Y. Xin-ju, F. Wen-bin, G. Chang-xin, L. MingYear:
2005
Language:
english
DOI:
10.1088/0256-307X/22/4/039
File:
PDF, 366 KB
english, 2005