Characterization of reactions at titanium/nickel silicide...

Characterization of reactions at titanium/nickel silicide interface using X-ray photoelectron spectroscopy and transmission electron microscopy

Jin Zhao, Jiong-Ping Lu, Yu-Qing Xu, Yu-Ji R Kuan, Lancy Tsung
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Volume:
211
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(03)00268-x
File:
PDF, 228 KB
english, 2003
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