Influence of pre-etching on specific contact parameters for...

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Influence of pre-etching on specific contact parameters for metal-GaN contacts

D. Mistele, J. Aderhold, H. Klausing, T. Rotter, O. Semchinova, J. Stemmer, D. Uffmann, J. Graul, F. Eberhard, M. Mayer, M. Schauler, M. Kamp, C. Ahrens
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Year:
1999
Language:
english
DOI:
10.1088/0268-1242/14/7/309
File:
PDF, 147 KB
english, 1999
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