Tungsten nitride films grown via pulsed laser deposition studied in situ by electron spectroscopies
G. Soto, W. de la Cruz, F.F. Castillón, J.A. Dı́az, R. Machorro, M.H. Farı́asVolume:
214
Year:
2003
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(03)00343-x
File:
PDF, 213 KB
english, 2003