Thermal annealing effects on a representative high-k/metal...

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Thermal annealing effects on a representative high-k/metal film stack

M. M. Hussain, M. A. Quevedo-lopez, H. N. Alshareef, H. C. Wen, D. Larison, B. Gnade, M. El-bouanani
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Year:
2006
Language:
english
DOI:
10.1088/0268-1242/21/10/012
File:
PDF, 196 KB
english, 2006
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