![](/img/cover-not-exists.png)
Compositional transition layer in SiO2/Si interface observed by high-resolution RBS
Kenji Kimura, Kaoru NakajimaVolume:
216
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(03)00386-6
File:
PDF, 97 KB
english, 2003