Simulation of dislocation accumulation in ULSI cells with...

Applied Surface Science 2003 Vol. 216; Iss. 1-4

Simulation of dislocation accumulation in ULSI cells with STI structure

Tetsuya Ohashi, Michihiro Sato, Takuya Maruizumi, Isao Kitagawa
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Volume:
216
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(03)00421-5
File:
PDF, 273 KB
english, 2003
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