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Coexistence of passive and active oxidation for O2/Si(0 0 1) system observed by SiO mass spectrometry and synchrotron radiation photoemission spectroscopy
Yuden Teraoka, Kousuke Moritani, Akitaka YoshigoeVolume:
216
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(03)00479-3
File:
PDF, 161 KB
english, 2003