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Modification of GaAs and copper surface by the formation of SiO2 aerogel film as an interlayer dielectric
Sung-Woo Park, Sang-Bae Jung, Min-Gu Kang, Hyung-Ho Park, Hae-Cheon KimVolume:
216
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0169-4332(03)00488-4
File:
PDF, 226 KB
english, 2003