Creating sub-surface channels in PMMA with ion beam...

Applied Surface Science 2003 Vol. 217; Iss. 1-4

Creating sub-surface channels in PMMA with ion beam lithography in only one step

Yvan Gonin, Frans Munnik, Frédéric Benninger, Sergueı̈ Mikhaı̈lov
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Volume:
217
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(03)00534-8
File:
PDF, 183 KB
english, 2003
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