Implantation of ions produced by the use of high power iodine laser
L Torrisi, S Gammino, A.M Mezzasalma, J Badziak, P Parys, J Wolowski, E Woryna, J Krása, L Láska, M Pfeifer, K Rohlena, F.P BoodyVolume:
217
Year:
2003
Language:
english
Pages:
13
DOI:
10.1016/s0169-4332(03)00551-8
File:
PDF, 493 KB
english, 2003