Study of range distribution parameters for fluorine ions...

Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Xiangdong Liu, Feng Li, Qingming Lu, Yueyuan Xia, Chuanjie Zhang
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Volume:
218
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(03)00619-6
File:
PDF, 123 KB
english, 2003
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