The Cabrera-Mott mechanism for silicon etching by fluorine...

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The Cabrera-Mott mechanism for silicon etching by fluorine atoms

Y. Babanov, A. Prokaznikov, V. Svetovoy
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Year:
1989
Language:
english
DOI:
10.1088/0953-8984/1/SB/039
File:
PDF, 125 KB
english, 1989
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