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A new comparator for measurement of diameter and form of cylinders, spheres and cubes under clean-room conditions
M. Neugebauer, F. Lüdicke, D. Bastam, H. Bosse, H. Reimann, C. TöpperwienYear:
1997
Language:
english
DOI:
10.1088/0957-0233/8/8/003
File:
PDF, 397 KB
english, 1997