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Resolution enhanced proximity printing by phase and amplitude modulating masks
S. Bühling, F. Wyrowski, E. Kley, A. J. M. Nellissen, L. Wang, M. DirkzwagerYear:
2001
Language:
english
DOI:
10.1088/0960-1317/11/5/325
File:
PDF, 416 KB
english, 2001