Capacitive slanted-beam three-axis accelerometer: I. Modelling and design
H. Rödjegård, G. I. Andersson, C. Rusu, M. Löfgren, D. BillgerYear:
2005
Language:
english
DOI:
10.1088/0960-1317/15/11/001
File:
PDF, 297 KB
english, 2005