Capacitive slanted-beam three-axis accelerometer: II. Characterization
H. Rödjegård, G. I. Andersson, C. Rusu, M. Löfgren, D. BillgerYear:
2005
Language:
english
DOI:
10.1088/0960-1317/15/11/002
File:
PDF, 450 KB
english, 2005