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Corona-poled piezoelectric polymer layers of P(VDF/TrFE) for micromachined silicon microphones
R. Schellin, G. Hess, R. Kressman, P. WassmuthYear:
1995
Language:
english
DOI:
10.1088/0960-1317/5/2/012
File:
PDF, 223 KB
english, 1995