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Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming
S. Ballandras, W. Daniau, S. Basrour, L. Robert, M. Rouillay, P. Blind, P. Bernede, D. Robert, S. Rocher, D. Hauden, S. Megtert, A. Labeque, L. Zewen, H. Dexpert, R. Comes, F. Rousseaux, M. F. Ravert,Year:
1995
Language:
english
DOI:
10.1088/0960-1317/5/3/001
File:
PDF, 540 KB
english, 1995