Crystallization of silicon carbide thin films by pulsed...

Applied Surface Science 1996 Vol. 106; Iss. none

Crystallization of silicon carbide thin films by pulsed laser irradiation

G. De Cesare, S. La Monica, G. Maiello, G. Masini, E. Proverbio, A. Ferrari, N. Chitica, M. Dinescu, R. Alexandrescu, I. Morjan, E. Rotiu
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Volume:
106
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00399-6
File:
PDF, 301 KB
english, 1996
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