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Preparation of high-quality hydrogenated amorphous silicon film with a new microwave electron cyclotron resonance chemical vapour deposition system assisted with hot wire
Z. Xiu-hong, C. Guang-hua, Y. Sheng-yi, R. Yan-dong, Z. Wen-li, H. Yue-huiYear:
2005
Language:
english
DOI:
10.1088/1009-1963/14/4/035
File:
PDF, 221 KB
english, 2005