XPS depth profiling of laser-annealed Zn+-implanted GaAs

Applied Surface Science 1997 Vol. 109-110; Iss. none

XPS depth profiling of laser-annealed Zn+-implanted GaAs

Ts Marinova, A Kakanakova-Georgieva, M Kalitzova, G Vitali, C Pizzuto, G Zollo
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Volume:
109-110
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(96)00744-1
File:
PDF, 288 KB
english, 1997
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