Large area diamond nucleation on Si(001) using...

Applied Surface Science 1997 Vol. 113-114; Iss. none

Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD

Hyeongmin Jeon, Akimitsu Hatta, Hidetoshi Suzuki, Toshimichi Ito, Takatomo Sasaki, Chongmu Lee, Akio Hiraki
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Volume:
113-114
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00815-x
File:
PDF, 418 KB
english, 1997
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