Laser assisted chemical vapour deposition of hydrogen...

Applied Surface Science 1997 Vol. 109-110; Iss. none

Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature

Göran Stenberg, Klaus Piglmayer, Mats Boman, Jan-Otto Carlsson
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Volume:
109-110
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00911-7
File:
PDF, 237 KB
english, 1997
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