Surface treatment effects on microscopic Si surface...

Applied Surface Science 1997 Vol. 113-114; Iss. none

Surface treatment effects on microscopic Si surface structure and SiSiO2 interface state

Hideaki Yamamoto, Katsuhide Okumura, Teruyuki Oya, Takeshi Kanashima, Masanori Okuyama, Yoshihiro Hamakawa
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Volume:
113-114
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(96)00924-5
File:
PDF, 476 KB
english, 1997
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