Improvement of the spin-on-glass process by ion...

Applied Surface Science 1997 Vol. 113-114; Iss. none

Improvement of the spin-on-glass process by ion implantation for highly reliable MOS devices

Hideki Mizuhara, Hiroyuki Watanabe, Kaori Misawa, Mamoru Arimoto, Makoto Akizuki, Hiroyuki Aoe, Kazunobu Mameno, Hiroshi Hanafusa, Keiichi Yodoshi
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Volume:
113-114
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00956-7
File:
PDF, 423 KB
english, 1997
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