Growth of patterned SiC by ion modification and annealing of C60 films on silicon
L. Moro, A. Paul, D.C. Lorents, R. Malhotra, R.S. Ruoff, L. Jiang, G.W. Stupian, K.J. Wu, S. SubramoneyVolume:
119
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(96)01086-0
File:
PDF, 553 KB
english, 1997