![](/img/cover-not-exists.png)
Novel sheet resistance measurement on AlGaN/GaN HEMT wafer adapted from four-point probe technique
J. Lehmann, C. Leroux, G. Reimbold, M. Charles, A. Torres, E. Morvan, Y. Baines, G. Ghibaudo, E. BanoYear:
2015
Language:
english
DOI:
10.1109/ICMTS.2015.7106134
File:
PDF, 1012 KB
english, 2015