Raman microprobe analysis of strained polysilicon deposited...

Applied Surface Science 1998 Vol. 123-124; Iss. none

Raman microprobe analysis of strained polysilicon deposited layers

H. Talaat, S. Negm, H.E. Schaffer, F. Adar, A.G. Nassiopoulos
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
123-124
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(97)00550-3
File:
PDF, 292 KB
english, 1998
Conversion to is in progress
Conversion to is failed