Plasma Generation by Resonant-Cavity Microwave Discharge and Its Applications for Material Processing
H. Tahara, K. Minami, T. Yasui, K. Onoe, Y. Tsubakishita, T. YoshikawaYear:
1993
DOI:
10.1143/JJAP.32.1822
File:
PDF, 1001 KB
1993