Hydrogen-Robust Submicron IrOx/Pb(Zr, Ti)O3/Ir Capacitors...

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Hydrogen-Robust Submicron IrOx/Pb(Zr, Ti)O3/Ir Capacitors for Embedded Ferroelectric Memory

T. Sakoda, T. S. Moise, S. R. Summerfelt, L. Colombo, G. Xing, S. R. Gilbert, A. L. S. Loke, S. Ma, R. Kavari, L. A. Wills, J. Amano
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Year:
2001
Language:
english
DOI:
10.1143/JJAP.40.2911
File:
PDF, 818 KB
english, 2001
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